TMAH+PR Analyser

The "M" applications are multi-component mixtures. One or two sensors are not enough: more physical property sensors are needed to determine the concentration of each individual component.

For this application in LCD manufacturing, Arenal developped a multisensor - multiparameter chemometry model, to determine each individual component on mg/l accuracy!

In this case Arenal supplies the ultrasonic spectroscopy, the spectrometer and a 3rd party conductivity sensor together with the Process Control Analyser. This system replaces chemical titrators and many laboratory tests, which are difficult to perform in clean rooms.

Some points of use in the industry

• flat screens, chips and solar cells

Technology

The technology of Ultrasonic Density is explained here.

The technology of UVVIS is not discussed yet on our site. Please ask us if you have questions.

Our probes

Arenal offers a variety of probes to measure TMAH+PR+Carbobate concentrations online:

1. The ceramic flow through temperature sensor is the first sensor is the QB blocks. Ultra high accuracy of 0,1 mK is reached by using specially designed 4 wire PT1000 elements and for this purpose developped differential PT1000 electronics. These electronics are embedded on the UDT, Ultrasonic Density Transmitter
2. The ultrasonic spectroscopy sensor is the second sensor in the QB blocks configuration.  The materials used are PEEK and ceramics.
3. The 4 pole Contacting Conductivity Probe (CCP) is the third sensor in the QB blocks configuration. It had SS316L poles in a PEEK housing.
4. The spectrometer probe (SMP-UVVIS) is an insertion probe, made from PEEK and sapphire. It has fixed glassfibers to be connected to the xenon lamp and spectrometer assembly, inside the PCA housing.

Embodiments

When choosing ultrasonic spectroscopy sensors, we herewith help you selecting the correct products. Arenal offers solutions for applications with a variety of embodiments. Actually in most cases only the probe size, body shape, body material and sensor material changes, while the transmitter and Analysers keeps the same.